Developers described the challenges on the way to practical EUV-lithography

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POSTER: computer news   ||   DEVELOPERS DESCRIBED THE CHALLENGES ON THE WAY TO PRACTICAL EUV-LITHOGRAPHY	DATE:2012-10-07
In 2000s, it was believed that the production of chips using EUV-projection starts in 2008-2010.  Theoretically, of course, it started.  But only in the form of pilot factory.  Thus, the company ASML EUV-steppers first NXE-3100 (in alpha version) shipped in 2009.  The price was $ 60 million for each scanner.  Precommercial version ASML steppers away customers at the end of 2010 had over $ 90 million in isolation from everything else it should be noted that the rise by 50% a year - it's hard! The Symposium International on Extreme Ultraviolet Lithography 2012 center IMEC talked about the operating experience EUV-lithography.  The main conclusion - very poor productivity, which is associated with low-power of the projection sources.   EUV-lithography is not based on a system of lenses and mirrors on the system, which leads to significant absorption by mirrors.  In the next two years, output power must be increased by 20 times. During the previous year using EUV-produced IMEC 3000 plates.  Setting the value of a $ 100 million worked in 15-30 times slower than today's much cheaper equipment.  To increase the performance needs at least 200-watt power EUV-radiation , and by 2016 - 500-1000-W . All this will lead to slowing the transition to smaller scale lithography.  In other words, this will lead to the cancellation of Moore's Law, but in reality - in impaired development of semiconductor market.  As result, the company will introduce intermediate process technologies.  For example, instead of going to the next step to the 14-nm process may appear 17-nm, 16-nm process technologies, and so on.   Intel Company, by the way, is going to hold on the use of modern scanners to 10 nm. It will use up to five masks on each chip - the so-called Multi-pattern projection or projection of templates series.  The company believes that this project is economically justified.    Related Products :

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