Toshiba is going to use Canon equipment in the production of flash memory chips with topological 15 nm, which is scheduled for release in 2015, the Japanese edition of Nikkan Kogyo Shimbun. Toshiba is the second largest producer of flash memory in real time, the company has mastered the production of products with a 19-nm.
Canon and Toshiba will jointly develop the technology nano lithography lithography. Corresponding production will be deployed at the factory Yokkaichi, located in Mie Prefecture, Japan.
In nanopechatnoy lithography image transferred onto the substrate by mechanical deformation of the resist special form, the technology allows you to create structures smaller than 10 nm.