A few days ago ASML representative admitted that some unnamed US customers placed an order for 15 scanners for the production of semiconductors. Orders placed on the next-generation scanners, which implies likely for the projection device with a wavelength of 13.5 nm - EUV- or deep ultraviolet range. Issue price of about one billion US dollars. Each scanner is worth about $ 100 million.
I should say that 15 EUV-scanners in one hand is a lot. Last year, ASML released 5 EUV-scanners and 6 more will be released this year. Scanners Manufacturer can increase the volume, but definitely not at times.
It also means that the installation of new equipment and putting it into action will continue until the end of 2017 or 2018. In addition, up to that time in ASML will not be enough powerful sources of radiation, so the EUV-range scanners will be used at first only to make two or three critical layers of 10-12 as part of the processors. The main thing in this story that ASML company get enough money to continue improving the technology intensive.