According to the manufacturer of semiconductor products to the date the so-called lithography with superhard ultraviolet (EUV) divided . If Samsung and GlobalFoundries are ready to begin the selective application of EUV-lithography is already within the 7-nm technology, Intel and TSMC prefer to wait before moving to 5-nm process technology.
Work on introduction of 5-nm technology is already underway as says one of TSMC CEO. It was agreed that of EUV-lithography will become an integral part of a 5-nm process technology in the performance of this company. Using EUV-equipment reduces the number of process steps and reduce the cost, and most importantly - improve the density of transistors on a chip. In the first half of 2019 will appear the first qualification samples of 5-nm products.